Online Book of abstracts

Found 4 abstract

The EMRP project SIB61 CRYSTAL: Crystalline and Self-assembled Structures as Length Standards

Corresponding author: Luca Boarino, Nanofacility, National Institute of Metrological Research (INRiM)

This projects aims to develop a new type of dimensional standards for step height and lateral resolution measurements for scanning […]

Type
POSTER
Session
METROLOGY
Day
Nov 25th, Nov 26th, Nov 27th
POSTER No.
METROLOGY_P1

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Sub-Nanometre Standards for Step Height Measurements Based on Self-Assembled Silicon Surfaces

Corresponding author: Ingo Busch, Physikalisch-Technische Bundesanstalt (PTB), Germany

Downscaling in semiconductor technology continues. Thereby the requirements on measurement methods for the nanometrology, like AFM, increase. In case of […]

Type
POSTER
Session
METROLOGY
Day
Nov 25th, Nov 26th, Nov 27th
POSTER No.
METROLOGY_P2

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Advanced 3D Chemical Metrology for Innovative Technologies: 3dmetchemit EMPIR Project

Corresponding author: Natascia De Leo, Nanofacility, National Institute of Metrological Research (INRiM)

Industry is increasingly using devices based on organic materials, such as smart optical films and advanced coatings, as it is […]

Type
POSTER
Session
METROLOGY
Day
Nov 25th, Nov 26th, Nov 27th
POSTER No.
METROLOGY_P3

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Chemical Imaging of Nanoscale Structures by Tip-Enhanced Raman Spectroscopy: Metrology and Reference Materials for Technology Transfer

Corresponding author: Dario Imbraguglio, National Institute of Metrological Research (INRiM)

Coupling scanning probe microscopy (SPM) with technological improvements of nondestructive Raman spectroscopy opened the door to the development of a […]

Type
POSTER
Session
METROLOGY
Day
Nov 25th, Nov 26th, Nov 27th
POSTER No.
METROLOGY_P4

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